authors Wu, Juan Zhu, Xiaohui Shapiro, David A Lee, Jonathan RI Van Buuren, Tony Biener, Monika M Gammon, Stuart A Li, Tian T Baumann, Theodore F Hitchcock, Adam Percival
has subject area 03 Chemical Sciences (FoR) 09 Engineering (FoR) 10 Technology (FoR) Physical Chemistry (Science Metrix)
keywords ATOMIC LAYER DEPOSITION Chemistry Chemistry, Physical Materials Science Materials Science, Multidisciplinary Nanoscience & Nanotechnology OPTIMIZATION PARTICLE Physical Sciences QUANTIFICATION RESOLUTION SCATTERING SPECTROMICROSCOPY SPECTROSCOPY Science & Technology Science & Technology - Other Topics Technology