A surface micromachined thermopile detector array with an interference-based absorber Conferences

Overview
Research
Identity
Additional Document Info
View All

authors

Wu, H
Emadi, Ali
Sarro, PM
de Graaf, G
Wolffenbuttel, RF

status

published

publication date

July 1, 2011

has subject area

09 Engineering (FoR)
10 Technology (FoR)
Nanoscience & Nanotechnology (Science Metrix)

published in

Journal of Micromechanics and Microengineering Journal

presented at event

21st European Workshop on Micromachining, Micromechanics and Microsystems Conference