A micromachined Kelvin probe with integrated actuator for microfluidic and solid-state applications
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Overview
status
publication date
- August 2005
has subject area
- 0906 Electrical and Electronic Engineering (FoR)
- 0910 Manufacturing Engineering (FoR)
- 0913 Mechanical Engineering (FoR)
- Nanoscience & Nanotechnology (Science Metrix)