Wafer-level packaging of three-dimensional MOEMS device with lens diaphragm Conferences

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authors

Lo, Joe F
Fang, Qiyin
Marcu, Laura
Kim, Eun Sok

status

published

publication date

January 1, 2007

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) Conference