Comparative annealing effect on bonded wafers in air and ultrahigh vacuum for microelectromechanical systems/microfluidics packaging
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Overview
status
publication date
- October 1, 2010
has subject area
- 0205 Optical Physics (FoR)
- 0906 Electrical and Electronic Engineering (FoR)
- Nanoscience & Nanotechnology (Science Metrix)