Electrothermally actuated inline microfluidic valve Conferences

authors

• Selvaganapathy, Ponnambalam
• Carlen, ET
• Mastrangelo, CH

status

• published 

publication date

• May 2003

has subject area

• 0906 Electrical and Electronic Engineering (FoR)
• 0912 Materials Engineering (FoR)
• 0913 Mechanical Engineering (FoR)
• Nanoscience & Nanotechnology (Science Metrix)

published in

• Sensors and Actuators, A: Physical  Journal

presented at event

• Workshop on Solid-State Sensors, Actuators and Microsystems  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• Instruments & Instrumentation
• Science & Technology
• Technology
• inline
• microfluidic
• paraffin
• parylene
• surface micromachined
• valve

Digital Object Identifier (DOI)

• 10.1016/s0924-4247(03)00030-x

start page

• 275

end page

• 282

volume

• 104

issue

• 3