Integrated ECR-PECVD and magnetron sputtering system for rare-earth-doped Si-based materials
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Overview
status
publication date
- February 2018
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0306 Physical Chemistry (incl. Structural) (FoR)
- 0912 Materials Engineering (FoR)
- Applied Physics (Science Metrix)
published in
- Surface and Coatings Technology Journal