Conference
Micromachined Porous Polymer for Bubble Free Electro-Osmotic Pump
Abstract
A novel porous polymer was microfabricated to serve as a porous plug for a new device, the porous plug electro-osmotic pump (pp-EOP). The plug eliminates any back pressure effects while enhances electro-osmotic flow in a channel. The pp-EOP was batch fabricated by surface micromachining on top of a silicon wafer. The pp-EOP device is driven by a periodic, zero-average injected current signal at low frequencies producing bubble-free …
Authors
Mutlu S; Yu C; Selvaganapathy P; Svec F; Mastrangelo CH; Frechet JMJ
Pagination
pp. 19-23
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
January 1, 2002
DOI
10.1109/memsys.2002.984050
Name of conference
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)