authors Fusch, Gerhard Rochow, N Wu, W-I Chan, E Nagpal, D Fusch, G Selvaganapathy, Ponnambalam Monkman, S Fusch, Christoph
published in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal
presented at event 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Conference
keywords Engineering Engineering, Electrical & Electronic Nanoscience & Nanotechnology Science & Technology Science & Technology - Other Topics Technology