A micromachined Kelvin probe for surface potential measurements in microfluidic channels and solid-state applications Conferences

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authors

Chu, LL
Takahata, K
Selvaganapathy, Ponnambalam
Shohet, JL
Gianchandani, YB

status

accepted

publication date

January 1, 2003

published in

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Journal

presented at event

IEEE International Solid-State Sensors and Actuators Conference Conference