<title>Fabrication of fused silica phase masks by reactive ion etching</title> Conferences uri icon

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authors

  • Chen, Genxiang
  • Jian, Shuisheng
  • Yang, Ling
  • Li, Xun
  • Cheng, Meiqiao
  • Zhu, Yaqing
  • Li, Li
  • Ge, Huang
  • Wang, Wei

publication date

  • September 23, 1996