Micro-Precision Hydrostatic Actuation System Conference Paper uri icon

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abstract

  • This paper reports on an important discovery that is: hydrostatic actuation systems are able to manipulate heavy loads with sub-micron precision and large stroke. In this relation, the design of a high-precision hydrostatic actuation system referred to as the ElectroHydraulic Actuator (EHA) is presented. A laboratory prototype of this system has achieved an unprecedented level of performance by being able to move a large load of 20Kg with a precision of 50 nanometers and a stroke of 12cm. This level of performance places the hydrostatic actuation concept in competition with piezoelectric platforms in terms positional accuracy. Experimental results from this prototype are reported and analyzed.

publication date

  • January 1, 2005