Full-chip GPU-accelerated curvilinear EUV dose and shape correction Conference Paper uri icon

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authors

  • Fujimura, Aki
  • Syrel, Oleg
  • Bouaricha, Ali
  • Niewczas, Marek
  • Su, Bo
  • Pang, Linyong
  • Zable, Harold R
  • Pearman, Ryan
  • Shendre, Abhishek

publication date

  • October 31, 2017