Progress toward a 30 nm silicon metal–oxide–semiconductor gate technology Conference Paper uri icon

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authors

  • Tennant, DM
  • Timp, GL
  • Ocola, LE
  • Green, M
  • Sorsch, T
  • Kornblit, A
  • Klemens, F
  • Kleiman, Rafael
  • Kim, Y
  • Timp, W

publication date

  • 1999