The relentless march of the MOSFET gate oxide thickness to zero Conference Paper uri icon

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authors

  • Timp, G
  • Bude, J
  • Baumann, F
  • Bourdelle, KK
  • Boone, T
  • Garno, J
  • Ghetti, A
  • Green, M
  • Gossmann, H
  • Kim, Y
  • Kleiman, Rafael
  • Kornblit, A
  • Klemens, F
  • Moccio, S
  • Muller, D
  • Rosamilia, J
  • Silverman, P
  • Sorsch, T
  • Timp, W
  • Tennant, D
  • Tung, R
  • Weir, B

publication date

  • April 2000