The relentless march of the MOSFET gate oxide thickness to zero Conferences

authors

• Timp, G
• Bude, J
• Baumann, F
• Bourdelle, KK
• Boone, T
• Garno, J
• Ghetti, A
• Green, M
• Gossmann, H
• Kim, Y
• Kleiman, Rafael
• Kornblit, A
• Klemens, F
• Moccio, S
• Muller, D
• Rosamilia, J
• Silverman, P
• Sorsch, T
• Timp, W
• Tennant, D
• Tung, R
• Weir, B

status

• published 

publication date

• April 2000

has subject area

• 0906 Electrical and Electronic Engineering (FoR)
• Applied Physics (Science Metrix)

published in

• Microelectronics Reliability  Journal

presented at event

• 10th Workshop on Dielectrics in Microelectronics  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• Nanoscience & Nanotechnology
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Science & Technology - Other Topics
• Technology

Digital Object Identifier (DOI)

• 10.1016/s0026-2714(99)00257-7

start page

• 557

end page

• 562

volume

• 40

issue

• 4-5