On the road to reliable MEMS Conferences

authors

• Gasparyan, A
• Shea, H
• Arney, S
• Aksyuk, V
• Simon, ME
• Pardo, F
• Chan, HB
• Kim, J
• Gates, J
• Goyal, S
• Kleiman, Rafael

status

• accepted 

publication date

• January 1, 2003

published in

• Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS  Journal

presented at event

• 2003 IEEE LEOS Annual Meeting Conference Proceedings  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• Optics
• Physical Sciences
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1109/leos.2003.1252956

International Standard Book Number (ISBN) 10

• 0-7803-7888-1

start page

• 626

end page

• 627

volume

• 2