Progress toward 10 nm CMOS devices Conference Paper uri icon

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authors

  • Timp, G
  • Bourdelle, KK
  • Bower, JE
  • Baumann, FH
  • Boone, T
  • Cirelli, R
  • Evans-Lutterodt, K
  • Garno, J
  • Ghetti, A
  • Gossmann, H
  • Green, M
  • Jacobson, D
  • Kim, Y
  • Kleiman, Rafael
  • Klemens, F
  • Kornlit, A
  • Lochstampfor, C
  • Mansfield, W
  • Moccio, S
  • Muller, DA
  • Ocola, IE
  • O'Malley, MI
  • Rosamilia, J
  • Sapjeta, J
  • Silverman, P
  • Sorsch, T
  • Tennant, DM
  • Timp, W
  • Weir, BE

publication date

  • January 1, 1998