SSRM analysis of dopant diffusion in InP based structures Conferences

authors

• Geva, M
• Akulova, Y
• Ougazzaden, A
• Holman, JP
• Richter, S
• Kleiman, Rafael

status

• accepted 

publication date

• January 1, 2000

published in

• Conference Proceedings - International Conference on Indium Phosphide and Related Materials  Journal

presented at event

• Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials  Conference

keywords

• Engineering
• Engineering, Electrical & Electronic
• MICROSCOPY
• Materials Science
• Materials Science, Characterization & Testing
• Materials Science, Multidisciplinary
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1109/iciprm.2000.850227

International Standard Book Number (ISBN) 10

• 0-7803-6320-5

start page

• 48

end page

• 51