Formation of light-emitting silicon nanoclusters in SiO2

Silicon nanoclusters/nanocrystals (Si-nc) in an SiO2 matrix exhibit strong visible luminescence, and so are of interest in the pursuit of a silicon-based light emitter for optoelectronics. We have investigated the formation of Si-nc by implanting excess Si at 90 keV into SiO2 films and then annealing to form nanoclusters by precipitation and ripening. The use of ion implantation provides control over composition and so allows us to optimize the …