Electrical properties of Si-XII and Si-III formed by nanoindentation Conferences

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authors

Wang, Y
Ruffell, S
Sears, K
Knights, Andrew
Bradby, JE
Williams, JS

status

published

publication date

December 2010

published in

2010 Conference on Optoelectronic and Microelectronic Materials and Devices Journal

presented at event

Devices (COMMAD) Conference