Modification of silicon waveguide structures using ion implantation induced defects Conferences

authors

• Knights, Andrew
• Dudeck, KJ
• Walters, WD
• Coleman, PG

status

• published 

publication date

• October 2008

has subject area

• Applied Physics (Science Metrix)

published in

• Applied Surface Science  Journal

presented at event

• 11th Workshop on Slow Position Beam Techniques for Solids and Surfaces  Conference

keywords

• Chemistry
• Chemistry, Physical
• Materials Science
• Materials Science, Coatings & Films
• PAS
• Physical Sciences
• Physics
• Physics, Applied
• Physics, Condensed Matter
• SOI
• Science & Technology
• Technology
• silicon waveguide

Digital Object Identifier (DOI)

• 10.1016/j.apsusc.2008.05.167

start page

• 75

end page

• 77

volume

• 255

issue

• 1