Suspended silicon waveguides for long-wave infrared wavelengths Journal Articles uri icon

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  • In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3  dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.


  • Penadés, J Soler
  • Sánchez-Postigo, A
  • Nedeljkovic, M
  • Ortega-Moñux, A
  • Wangüemert-Pérez, JG
  • Xu, Y
  • Halir, R
  • Qu, Z
  • Khokhar, AZ
  • Osman, A
  • Cao, W
  • Littlejohns, CG
  • Cheben, Pavel
  • Molina-Fernández, I
  • Mashanovich, GZ

publication date

  • February 15, 2018