Toggle navigation
Home
People
Departments
Research
About
Login
Search
Junction delineation of 0.15 μm MOS devices using scanning capacitance microscopy
Conferences
Overview
Research
Identity
Additional Document Info
View All
Overview
authors
Kleiman, Rafael
O'Malley, ML
Baumann, FH
Garno, JP
Timp, GL
status
accepted
publication date
January 1, 1997
published in
Technical Digest - International Electron Devices Meeting
Journal
presented at event
International Electron Devices Meeting. IEDM Technical Digest
Conference
Research
keywords
Engineering
Engineering, Electrical & Electronic
Science & Technology
Technology
Identity
Digital Object Identifier (DOI)
10.1109/iedm.1997.650477
International Standard Book Number (ISBN) 10
0-7803-4101-5
Additional Document Info
start page
691
end page
694