Junction delineation of 0.15 μm MOS devices using scanning capacitance microscopy Conferences

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authors

Kleiman, Rafael
O'Malley, ML
Baumann, FH
Garno, JP
Timp, GL

status

accepted

publication date

1997

published in

Technical Digest - International Electron Devices Meeting Journal

presented at event

International Electron Devices Meeting. IEDM Technical Digest Conference