NONSWELLING NEGATIVE RESISTS INCORPORATING CHEMICAL AMPLIFICATION - THE ELECTROPHILIC AROMATIC-SUBSTITUTION APPROACH

FRECHET JMJ; MATUSZCZAK S; STOVER HDH; WILLSON CG; RECK B

REICHMANIS E; MACDONALD SA; IWAYANAGI T

ACS SYMPOSIUM SERIES

412

pp. 74-85

AMER CHEMICAL SOC

January 1, 1989

0-8412-1701-7

SYMP AT THE 197TH NATIONAL MEETING OF THE AMERICAN CHEMICAL SOC - POLYMERS IN MICROLITHOGRAPHY : MATERIALS AND PROCESSES

DALLAS, TX

April 9, 1989

April 14, 1989

POLYMERS IN MICROLITHOGRAPHY