NONSWELLING NEGATIVE RESISTS INCORPORATING CHEMICAL AMPLIFICATION - THE ELECTROPHILIC AROMATIC-SUBSTITUTION APPROACH Conferences

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authors

FRECHET, JMJ
MATUSZCZAK, S
Stover, Harald
WILLSON, CG
RECK, B

status

published

publication date

January 1, 1989

published in

POLYMERS IN MICROLITHOGRAPHY Journal

presented at event

SYMP AT THE 197TH NATIONAL MEETING OF THE AMERICAN CHEMICAL SOC - POLYMERS IN MICROLITHOGRAPHY : MATERIALS AND PROCESSES Conference