Low background, UHV compatible scintillator detector for the CLS cryo scanning soft X-ray microscope

A new soft X-ray scanning transmission X-ray microscope (STXM) optimized for cryo spectro-tomography was designed and commissioned at the Canadian Light Source (CLS). The instrument was required to achieve ultra high vacuum and be compatible with in-situ plasma cleaning. It also required a scintillator detector, and the design of this detector had to evolve to meet these environmental requirements. The scintillator deposition technique, and the suppression of background by introduction of an edge filter are also presented.