Modeling Voids in Silicon Conferences

authors

• Hasanuzzaman, M
• Haddara, Yaser
• Knights, Andrew

status

• published 

publication date

• January 1, 2008

published in

• NSTI NANOTECH 2008, VOL 3, TECHNICAL PROCEEDINGS  Journal

presented at event

• Nanotechnology Conference and Trade Show (Nanotech 2008)  Conference

keywords

• Chemistry
• Chemistry, Multidisciplinary
• ENHANCED DIFFUSION
• Engineering
• Engineering, Biomedical
• Engineering, Electrical & Electronic
• MEV-IMPLANTED SI
• Nanoscience & Nanotechnology
• Physical Sciences
• Physics
• Physics, Applied
• Science & Technology
• Science & Technology - Other Topics
• Technology
• VACANCY CLUSTERS
• modeling
• silicon
• void

International Standard Book Number (ISBN) 13

• 978-1-4200-8505-1

start page

• 573

end page

• +

volume

• 3