Journal article
Technique for monolithic fabrication of microlens arrays.
Abstract
A microlens fabrication process is described which can be used in applications requiring integration of optical elements (lenses) and microcircuits. The process is fully compatible with 1C fabrication technology and uses commercially available 1C processing materials. The obtained microlenses are of excellent quality and basically show diffraction-limited resolution with ~1-microm spot size. Extensions of the process to production of …
Authors
Popovic ZD; Sprague RA; Neville Connell GA
Journal
Applied Optics, Vol. 27, No. 7, pp. 1281–1284
Publisher
Optica Publishing Group
Publication Date
April 1, 1988
DOI
10.1364/ao.27.001281
ISSN
1559-128X