Modeling the suppression of boron diffusion in Si∕SiGe due to carbon incorporation Conference Paper

Overview
Research
Identity
Additional Document Info
View All

authors

Rizk, Samer
Haddara, Yaser
Sibaja-Hernandez, A

status

published

publication date

2006

has subject area

published in

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures Journal

presented at event

8th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors Conference