Electron Channeling Contrast Imaging for Non-Destructive Analysis of Extended Defects in Semiconductor Thin Films and Device Structures Academic Article uri icon

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authors

  • Katz, MB
  • Twigg, ME
  • Maximenko, SI
  • Bassim, Nabil
  • Mahadik, NA
  • Jernigan, GG
  • Canedy, CL
  • Abell, J
  • Affouda, CA

publication date

  • August 2014