Journal article
Electron Channeling Contrast Imaging for Non-Destructive Analysis of Extended Defects in Semiconductor Thin Films and Device Structures
Authors
Katz M; Twigg M; Maximenko S; Bassim N; Mahadik N; Jernigan G; Canedy C; Abell J; Affouda C
Journal
Microscopy and Microanalysis, Vol. 20, No. S3, pp. 1064–1065
Publisher
Oxford University Press (OUP)
Publication Date
August 1, 2014
DOI
10.1017/s1431927614007041
ISSN
1431-9276