authors
- Katz, MB
- Twigg, ME
- Maximenko, SI
- Bassim, Nabil
- Mahadik, NA
- Jernigan, GG
- Canedy, CL
- Abell, J
- Affouda, CA
Electron Channeling Contrast Imaging for Non-Destructive Analysis of Extended Defects in Semiconductor Thin Films and Device Structures
Journal Articles
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Overview
status
publication date
- August 2014
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0601 Biochemistry and Cell Biology (FoR)
- 0912 Materials Engineering (FoR)
- Microscopy (Science Metrix)
published in
- Microscopy and Microanalysis Journal