Using the Focused Ion Beam to Perform Serial Sectioning of Micron-Sized Particles for Coordinated Nanoscale Analysis

Standard Focused Ion Beam (FIB) lift-out methods for production of transmission electron microscopy (TEM) thin sections destroy many cubic microns of material in order to produce a single 100-nm thick section. Microtome sectioning, in contrast, allows serial sectioning of adjacent multiple 100-nm sections, without loss of materials between sections, but lacks site specificity. In order to maximize the yield of analyzable material in thin …