MOCVD growth of thick AlN and AlGaN superlattice structures on Si substrates Academic Article uri icon

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authors

  • Mastro, MA
  • Eddy, CR
  • Gaskill, DK
  • Bassim, Nabil
  • Casey, J
  • Rosenberg, A
  • Holm, RT
  • Henry, RL
  • Twigg, ME

publication date

  • January 2006