High-reflectance III-nitride distributed Bragg reflectors grown on Si substrates

Distributed Bragg reflectors (DBRs) composed of an AlN∕AlGaN superlattice were grown of Si (111) substrates. The first high-reflectance III-nitride DBR on Si was achieved by growing the DBR directly on the Si substrate to enhance the overall reflectance due to the high index of refraction contrast at the Si∕AlN interface. For a 9× DBR, the measured peak reflectance of 96.8% actually exceeded the theoretical value of 96.1%. The AlN∕AlGaN superlattice served the added purpose of compensating for the large tensile strain developed during the growth of a crack-free 500nm GaN∕7× DBR/Si structure. This achievement opens the possibility to manufacture high-quality III-nitride optoelectronic devices without optical absorption in the opaque Si substrate.