Engineered porous and coated Silica particulates for CMP applications

The aim of this study has been to synthesize the microporous silica spheres and to coat as-synthesized SiO2 with CeO2 for CMP applications. First, spherical microporous silica powders with a narrow size distribution have been prepared by a precipitation technique involving the hydrolysis reaction of a silicon alkoxide in ethanol. The interparticle microporosity has been created by adsorption of an organic compound (glycerol) as the porogen. The …