Journal article
Characteristics of ultraviolet-assisted pulsed-laser-deposited Y2O3 thin films
Abstract
The properties of thin Y2O3 films grown using an in situ ultraviolet (UV)-assisted pulsed laser deposition (PLD) technique were studied. With respect to Y2O3 films grown by conventional PLD under similar conditions but without UV illumination, the UVPLD-grown films exhibited better structural and optical properties, especially for lower substrate temperatures, from 340 to 400 °C. These layers were highly crystalline and textured along the (111) …
Authors
Craciun V; Lambers ES; Bassim ND; Singh RK; Craciun D
Journal
Journal of Materials Research, Vol. 15, No. 2, pp. 488–494
Publisher
Springer Nature
Publication Date
February 2000
DOI
10.1557/jmr.2000.0073
ISSN
0884-2914