Positron spectroscopy of vacancy-type defects in Si created by 5 keV implantation
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Overview
status
publication date
- November 23, 1998
has subject area
- 0204 Condensed Matter Physics (FoR)
- 0912 Materials Engineering (FoR)
- 1007 Nanotechnology (FoR)
- Fluids & Plasmas (Science Metrix)