The Application of Solid Source Diffusion in the Vertical Replacement-Gate (VRG) MOSFET Academic Article uri icon

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authors

  • Oh, Sang-Hyun
  • Hergenrother, JM
  • Monroe, Don
  • Nigam, T
  • Klemens, FP
  • Kornblit, A
  • Mansfield, WM
  • Baumann, FH
  • Gossmann, HJ
  • King, CA
  • Kleiman, Rafael
  • Vuong, H-H
  • Weber, GR
  • Rafferty, CS

publication date

  • January 2000