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Journal article

Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies

Abstract

We have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved …

Authors

Kleiman RN

Journal

MRS Online Proceedings Library, Vol. 406, No. 1, pp. 221–226

Publisher

Springer Nature

Publication Date

12 1995

DOI

10.1557/proc-406-221

ISSN

0272-9172