Journal article
Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies
Abstract
We have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved …
Authors
Kleiman RN
Journal
MRS Online Proceedings Library, Vol. 406, No. 1, pp. 221–226
Publisher
Springer Nature
Publication Date
12 1995
DOI
10.1557/proc-406-221
ISSN
0272-9172