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Journal article

Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies

Abstract

We have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved performance in a number of significant ways. We discuss the actual implementation of this idea in the construction of a scanner, possible applications for this design, and briefly discuss results obtained.

Authors

Kleiman RN

Journal

MRS Online Proceedings Library, Vol. 406, No. 1, pp. 221–226

Publisher

Springer Nature

Publication Date

January 1, 1996

DOI

10.1557/proc-406-221

ISSN

0272-9172
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