Analysis of the novel flexure parallel micromanipulators based on multi-level displacement amplifier with/without symmetrical design

Conventional flexure-based parallel micromanipulators (FPM) usually suffer from a small stroke. The performance of a FPM is highly related to the stroke of each actuated limb and the associated constraints, including non-actuated joints. To conquer the drawbacks of the small workspace of conventional FPMs, a device for displacement amplification could improve motion ranges when incorporated into the design of the actuated limbs. This research is focused on the development of a group of unique FPMs with/without symmetrical design based on a multi-level displacement amplifier. Firstly, structural modeling based on a compact and modular design is introduced. Then a macro/micro analysis of the displacement amplifier is conducted. Subsequently, a comprehensive finite-element modeling including the strain and total deformation, modal and frequency response is undertaken to examine the mechanical behavior of the proposed mechanism. The developed method and technology provide a promising solution to enhance the performance of generic FPMs.