Conceptual Design and Kinematic Analysis of a Compliant Parallel Mechanism for Micro/Nano Scale Manipulation

There is a great need in various fields to be able to produce motion on a micro/nano scale with three translational degrees of freedom (DOF). Such fields include optical alignment, cell injection operation, precision manufacturing and micro electro mechanical systems. This research is concerned with the design and analysis of a compliant parallel micromanipulator (CPM) for micro/nano scale manipulation. Several kinematic structures including a novel three-cylindrical-prismatic-revolute CPM is proposed. Based on the established pseudo-rigid-body model of the CPM, the kinematic models are derived. The CPM is featured by pizeo-driven and flexure hinges, thus it has advantages such as sub nanometer resolution, large force generation, sub-millisecond response, and extremely low steady state power consumption.Copyright © 2009 by ASME