Conference
Formation of Si-nanocrystals in SiO2 via ion implantation and rapid thermal processing
Authors
Crowe IF; Hulko O; Knights AP; Hylton NP; Halsall MP; Ruffell S; Gwilliam RM
Volume
7606
Publisher
SPIE, the international society for optics and photonics
Publication Date
February 11, 2010
DOI
10.1117/12.852924
Name of conference
Silicon Photonics V
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X