Direct high-resolution determination of vacancy-type defect profiles in ion-implanted silicon Conferences

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authors

Coleman, PG
Mason, RE
Dyken, M Van
Knights, Andrew

status

published

publication date

June 8, 2005

has subject area

published in

Journal of Physics Condensed Matter Journal

presented at event

1st International Workshop on Coordination Action on Defects Relevent to Engineering Silicon-Based Devices Conference