Impact of buffered layer growth conditions on grown-in vacancy concentrations in molecular beam epitaxy silicon germanium Conferences

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authors

Shoukri, KM
Haddara, Yaser
Knights, Andrew
Coleman, PG
Rahman, MM
Tatsuyama, CC

status

published

publication date

January 1, 2004

published in

Materials Research Society Symposium - Proceedings Journal

presented at event

Symposium on Silicon Front-End Junction Formation-Physics and Technology held at the 2004 MRS Spring Meeting Conference