Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early
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Overview
status
publication date
- May 15, 2012
has subject area
- 02 Physical Sciences (FoR)
- 03 Chemical Sciences (FoR)
- 09 Engineering (FoR)
- Aluminum Oxide (MeSH)
- Nanoscience & Nanotechnology (Science Metrix)
- Polymethyl Methacrylate (MeSH)
- Semiconductors (MeSH)
- Silicon Dioxide (MeSH)
published in
- Advanced Materials Journal