Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide Journal Articles uri icon

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  • We report on the experimental demonstration and analysis of a new waveguide principle using subwavelength gratings. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Subwavelength grating waveguides in silicon-on-insulator are fabricated with a single etch step and allow for flexible control of the effective refractive index of the waveguide core simply by lithographic patterning. Experimental measurements indicate a propagation loss as low as 2.1 dB/cm for subwavelength grating waveguides with negligible polarization and wavelength dependent loss, which compares favourably to conventional microphotonic silicon waveguides. The measured group index is nearly constant n(g) ~1.5 over a wavelength range exceeding the telecom C-band.


  • Bock, Przemek J
  • Cheben, Pavel
  • Schmid, Jens H
  • Lapointe, Jean
  • Delâge, André
  • Janz, Siegfried
  • Aers, Geof C
  • Xu, Dan-Xia
  • Densmore, Adam
  • Hall, Trevor J

publication date

  • September 13, 2010