Journal article
Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared.
Abstract
We present a new type of mid-infrared silicon-on-insulator (SOI) waveguide. The waveguide comprises a sub-wavelength lattice of holes acting as lateral cladding while at the same time allowing for the bottom oxide (BOX) removal by etching. The waveguide loss is determined at the wavelength of 3.8 μm for structures before and after being underetched using both vapor phase and liquid hydrofluoric acid (HF). A propagation loss of 3.4 dB/cm was …
Authors
Soler Penadés J; Alonso-Ramos C; Khokhar AZ; Nedeljkovic M; Boodhoo LA; Ortega-Moñux A; Molina-Fernández I; Cheben P; Mashanovich GZ
Journal
Optics Letters, Vol. 39, No. 19, pp. 5661–5664
Publisher
Optica Publishing Group
Publication Date
October 1, 2014
DOI
10.1364/ol.39.005661
ISSN
0146-9592