Submicrometer-wide amorphous and polycrystalline anatase TiO_2 waveguides for microphotonic devices Academic Article uri icon

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abstract

  • We demonstrate amorphous and polycrystalline anatase TiO(2) thin films and submicrometer-wide waveguides with promising optical properties for microphotonic devices. We deposit both amorphous and polycrystalline anatase TiO(2) using reactive sputtering and define waveguides using electron-beam lithography and reactive ion etching. For the amorphous TiO(2), we obtain propagation losses of 0.12 ± 0.02 dB/mm at 633 nm and 0.04 ± 0.01 dB/mm at 1550 nm in thin films and 2.6 ± 0.5 dB/mm at 633 nm and 0.4 ± 0.2 dB/mm at 1550 nm in waveguides. Using single-mode amorphous TiO(2) waveguides, we characterize microphotonic features including microbends and optical couplers. We show transmission of 780-nm light through microbends having radii down to 2 μm and variable signal splitting in microphotonic couplers with coupling lengths of 10 μm.

authors

  • Bradley, Jonathan
  • Evans, Christopher C
  • Choy, Jennifer T
  • Reshef, Orad
  • Deotare, Parag B
  • Parsy, François
  • Phillips, Katherine C
  • Lončar, Marko
  • Mazur, Eric

publication date

  • October 8, 2012