Cyclic CVD Modification of Straight Pore Alumina Membranes

Alumina oxide was deposited in the straight nanosize pores of Anopore alumina membrane by the alternative introduction of trimethylaluminum (TMA) and water vapor to the membrane pores. The chemical vapor deposition (CVD) modification was conducted under two different schemes: (1) cyclic CVD with residual pressure and (2) cyclic CVD with purge. The membranes were characterized by single gas helium permeance and water vapor/oxygen multiple gas …