Conference
Defect Distribution in Large CZ-Silicon Wafers Investigated by Positron Annihilation Spectroscopy
Authors
Mascher P; Puff W; Hahn SK; Cho KH; Lee BY
Volume
83-87
Pagination
pp. 413-418
Publisher
Trans Tech Publications
Publication Date
January 1, 1992
DOI
10.4028/www.scientific.net/msf.83-87.413
Conference proceedings
Materials Science Forum
ISSN
0255-5476