EFFECTS OF D-DEFECTS IN CZ SILICON UPON THIN GATE OXIDE INTEGRITY Conference Paper uri icon

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authors

  • PARK, JG
  • CHOI, SP
  • LEE, GS
  • JEONG, YJ
  • KWAK, YS
  • SHIN, CK
  • HAHN, S
  • SMITH, WL
  • Mascher, Peter

publication date

  • January 1, 1993