Effects of D-Defects in CZ Silicon Upon Thin Gate Oxide Integrity Conferences uri icon

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authors

  • Park, J-G
  • Choi, S-P
  • Lee, G-S
  • Jeong, Y-J
  • Kwak, Y-S
  • Shin, C-K
  • Hahn, S
  • Smith, WL
  • Mascher, Peter

publication date

  • 1993