The properties of silicon nitride formed through the decomposition of trisdimethylaminosilane in an argon plasma Conferences

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authors

Boudreau, MG
Brown, J
Mascher, Peter

status

published

publication date

January 1, 1996

published in

PROCEEDINGS OF THE THIRTEENTH INTERNATIONAL CONFERENCE ON CHEMICAL VAPOR DEPOSITION Journal

presented at event

13th International Conference on Chemical Vapor Deposition (CVD XIII), at the Electrochemical-Society Meeting Conference